Rumor

Rumor: Chinese domestic DUVi tool expected to enter HVM with YMTC, Huawei, and SMIC as first customers

Thursday, December 18, 2025 at 07:32 AM

A new domestic Deep Ultraviolet immersion (DUVi) lithography tool is rumored to enter High-Volume Manufacturing (HVM) in the coming year, with YMTC, Huawei, and SMIC named as the initial customers. The report also claims that the Laser-Produced Plasma (LPP) light source for a domestic EUV tool was completed in 2022.

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