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Japan expands advanced chip capacity with multiple EUV lithography tool installations

Sunday, February 15, 2026 at 09:22 PM

Japan is increasing its inventory of ASML extreme ultraviolet (EUV) lithography machines to support advanced semiconductor manufacturing. Following government support, three units were installed in 2025, with Rapidus reportedly securing its second machine. These tools, costing over 300 billion yen each, are essential for Japan's strategy to re-establish a footprint in cutting-edge logic chip production.

Context

Japan has successfully installed three EUV (Extreme Ultraviolet) lithography machines in 2025, marking a pivotal recovery for its domestic semiconductor manufacturing capabilities. After years of falling behind in leading-edge logic production, the country is rapidly deploying these specialized tools—each costing upwards of 300 billion yen—to reclaim its position in the global supply chain. This technological influx is driven by aggressive national policy and financial subsidies aimed at securing domestic production of advanced AI and logic chips. Dutch lithography giant ASML is the central player in this expansion as the world’s sole supplier of EUV systems. The rollout is headlined by the state-backed startup Rapidus, which recently secured its second EUV unit to support its ambitious roadmap for 2nm chip production by 2027. By transforming Japan from an "EUV desert" into a high-capacity hub, these installations provide the essential infrastructure required to compete with global foundries and ensure supply chain resilience for next-generation computing.

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