RumorUnverified
CXMT Beijing, Hua Hong, and Pengxinwei reportedly order domestic ArFi immersion DUV lithography tools
Wednesday, April 1, 2026 at 05:43 AM
Domestic Chinese semiconductor manufacturers including CXMT Beijing, Hua Hong, and Pengxinwei have reportedly placed orders for domestically produced ArFi immersion DUV lithography tools. This indicates at least three such orders for domestic ArFi equipment within the current year. Furthermore, supply chain partners are reportedly receiving significant orders from Yuliangshengda.
Context
As of April 2026, China's semiconductor industry is accelerating its transition to domestic equipment following reports that CXMT Beijing, Hua Hong Semiconductor, and Pengxinwei have each ordered a domestically produced ArFi immersion DUV lithography tool. These orders, totaling at least three units this year, indicate that local fabs are moving beyond testing and toward small-scale deployment of lithography hardware developed by firms like Yuliangsheng and SMEE. This shift is driven by tightening Western export controls that have restricted access to ASML’s more advanced Twinscan 19XX series systems.
While industry experts previously estimated that domestic immersion tools were several years away from high-volume manufacturing, the entry of these machines into Tier-1 fabs like Hua Hong suggests a faster-than-expected maturation of the supply chain. These tools are critical for sustaining 28nm and 40nm production lines and could potentially support nodes down to 7nm through multi-patterning techniques. For investors, this marks a pivotal moment in Beijing’s self-sufficiency drive, as domestic leaders attempt to de-risk their capacity expansion from further geopolitical disruptions.
Sources (7)
China’s top chip foundries move to consolidate as Beijing pushes semiconductor self-sufficiency — SMIC and Hua Hong Semiconductor deals pave the path to unified power | Tom's HardwareA New Era for the Chinese Semiconductor Industry: Beijing Responds to Export Controls - American Affairs Journallithography – dpc 2024 - JP KleinhansChina's Progress in Semiconductor Manufacturing ...Smic Tests Domestic Immersion Duv Lithography Tool | China’s Semiconductor Self-sufficiencyChinese Semiconductors and AI ChipsChina: DUV Lithography Machine Trials Begin as Companies Halt Purchases of Nvidia Chip
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