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IBM Semiconductors GM Mukesh Khare announces five-year collaboration with Lam Research for sub-1nm nodes

Wednesday, March 11, 2026 at 06:15 AM

Lam Research and IBM have entered a five-year agreement to collaborate on semiconductor manufacturing processes and materials aimed at sub-1nm logic nodes. The partnership focuses on advanced etch, deposition, and developing processes for High NA EUV lithography.

Context

On March 10, 2026, IBM and Lam Research Corp. announced a new five-year agreement to develop semiconductor manufacturing processes and materials for sub-1nm logic nodes. This collaboration, based at the NY Creates Albany NanoTech Complex, focuses on advancing High-NA EUV lithography, novel materials, and complex etch and deposition techniques. The partnership aims to accelerate the industry's transition to 3D scaling and higher-performance transistors required for the AI era. Mukesh Khare, GM of IBM Semiconductors, expressed his enthusiasm for the project, stating, "We are thrilled to be expanding our collaboration to tackle the next set of challenges to enable High-NA EUV lithography and sub-1nm nodes." This statement was officially released as part of the joint corporate announcement. The initiative builds on a decade-long partnership that previously enabled breakthroughs in 7nm and 2nm node technologies, positioning both companies at the forefront of the global semiconductor supply chain.

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