News
SMIC founder Richard Chang predicts China will achieve domestic EUV lithography breakthrough within five years
Monday, March 23, 2026 at 09:08 PM
Richard Chang, founder of SMIC, stated in an interview that China is developing a domestic EUV lithography system using a different methodology than ASML. He predicts a breakthrough for mass production within two to five years, despite ongoing US export restrictions and dependence on specialized Japanese materials and components.
Context
In a significant projection for China’s semiconductor independence, SMIC founder Richard Chang stated in a January 2026 interview with Toyokeizai that China could achieve a breakthrough in domestic EUV (Extreme Ultraviolet) lithography within two to five years. Chang, often called the "godfather" of the Chinese chip industry, claimed that development is currently underway using methods distinct from ASML, the Dutch firm that currently holds a global monopoly on EUV technology. This timeline suggests a rapid acceleration of domestic capabilities despite ongoing U.S. export controls that have blocked China from purchasing advanced ASML scanners since 2019.
While Chang expressed confidence in achieving mass-production levels by 2031, industry experts remain cautious. Proponents of the breakthrough point to recent EUV prototype successes reported in late 2025; however, engineers note that specialized Japanese technology in the supply chain remains a critical barrier. Achieving high-yield logic production below the 7nm threshold requires not just the lithography tool, but a complex ecosystem of resists and masks where Nikon and Canon still hold a competitive edge. This development is being closely watched as SMIC pivots toward becoming a national champion for the domestic Chinese market.
Sources (11)
中国半導体の父が明かす｢EUV国産化まであと5年｣→アメリカの制裁があっても進化は止まらない｢微細化の独自技術｣｢ニコンとキヤノンの役割｣ | 特集 | 東洋経済オンラインChina Speeds Up Advanced Chip Development[Chipformation] The Place Founded by the 'Semiconductor ...Key Differences Remain between U.S. and Japanese Advanced Semiconductor Export Controls on China | Perspectives on Innovation | CSISTable of ConTenTsThe SMIC Smackdown - The Wire ChinaChina's Struggle to Manufacture Advanced SemiconductorsCaught in the Crossfire: ASML amidst the US-China Chip War | Benelux Chamber of Commerce in Shanghai
Related Companies
SMIC
981
ASML
ASML